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Refurbished AG 4100 for RTA RTP from Allwin21 Corp |
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(Click image for full size) Manufacture:AG Associates Refurbished by:Allwin21 Corp Heatpulse is a Registered Trademark of AG Associates.AG Heatpulse 4100 Series are single-wafer, cassette-to-cassette rapid thermal processors, capable of processing in inert or corrosive ambient. The unit is built for the production environment. AG4100 is a rapid thermal processor which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures. High-intensity visible radiation heats wafers for short periods. Fast heating and cooling rates unobtainable in conventional technologies. Consistent wafer-to-wafer process cycle repeatability. Elimination of external contamination. Small footprint and energy efficiency. Wafer Size 4”, 5” and 6” . Robot control ability. (Equip Tech. robot with one arm) Single Wafer Process. Gold coated aluminum chamber with water cooling Radiation heating lamp module 4-gas channel with 4 MFCs Cassette to cassette wafer handling Multiple cycle processing capability Steady Temp Range: 600°C to 1250°C for pyrometer sensor, 100°C to 600°C for Thermocouple. Steady state process time 0 to 30000 sec programmable. Temp Ramp-up Speed: 10°C to 120°C for wafer. Programmable Ramp down speed 10°C - 150°C for wafer Robot wafer cycling: 80 Wafers/Hr. AG 4100 RTA RTP is a versatile tool, which is useful for many applications: • Ion Implant Activation • Polysilicon Annealing • Oxide Reflow • Silicide Formation • Contact Alloying • Oxidation and Nitridation • GaAs Processing ______________________________________________________________ Allwin21 Corp. can also provide Allwin21 Corp proprietary AW Control Software and Superior Temperature Control Technology to upgrade the refurbished AG Heatpulse 4100 which provides the following significant advantages Add timer watch for the oven safety issue (the original has no safety interlock for the computer locks up, chamber would be burned if the computer locks up when process running). The new software allows to do either 3",4",6”without changing hardware and robot teaching. It is good for the R&D or small production purpose. 2 or 3 susceptor towers can be put to handle 2 or 3 different wafer size for GaAs or InP wafers. The new software with power summary function to detect either lamp failure or sensor failure New hardware includes: three interface cards with cable, new timer counter with watch dog, Pentium Computer with 17” LCD Monitor, standard keyboard and mouse. Software calibration and easy to be done. More functions and I/O hardware “exposed” for easier maintenance and trouble shooting. It is easy to edit recipe with GUI and graph display. Save all process data on the computer hard disk. A/D and D/A precision is 14 to 16 bits. Detect in process and with color curve displayed on the screen. Robot teach is on the GUI and easy to do the procedure with new concept teaching method. Lamp damage detect in process. Sensor status detect function. On line help function.
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