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Refurbished Matrix 303 for plasma etching from Allwin21 Corp

Ad #	840902
Contact	peter chen
Address	1550 Norman Ave
City	Santa Clara
State	CA
Zip	95054
Phone
Web site	Click to visit
Type	Not Applicable
Created	July 2, 2008
Updated	July 30, 2008
Expires	July 2, 2009
Viewed	67 times

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Refurbished Matrix 303 for plasma etching from Allwin21 Corp

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Refurbished Matrix 303

Manufacturer:Matrix Integrated Systems

Refurbished by:Allwin21 Corp

Matrix is a Registered Trademark of Matrix Integrated Systems, Inc.The model 303 is an electro-mechanical production system used to etch materials such as nitride, oxide poly-silicon etc. from the surface of silicon or other substrate. Each wafer is processed individually by means a chemical reaction induced by a gas plasma.

Single Wafer, Multi-Step Processing
Closed-Loop Temperature Control
Pressure Control
Accurate, closed-loop pressure control with “butterfly-style” throttle valve and capacitance manometer
RF power: 100 to 500 watts
Timed cycles up to 4 hour each
Matrix 303 consists of the following major assemblies.
Main Console:
Process Model,
Operator interface Model,
Wafer Transport Module,
Elevator Module,
PC Control Module.
Power Supply Console:
RF Generator,
DC Supply,
AC Distribution,
Gas Distribution panel,
Temperature/Pressure Control Module.
Vacuum Pump (optional):
Vacuum Hose and Connector, Ballast Assembly.
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Allwin21 Corp. can also provide advanced Equip Robot transfer wafer technology , AW Control Software and Superior Temperature Control Technology to upgrade the refurbished Matrix303 which provides the following significant advantages.

New hardware includes: New control Board with cable, new timer counter with watch dog, Pentium Computer with 17” LCD Monitor, standard keyboard and mouse.
Software calibration and easy to be done.
More functions and I/O hardware “exposed” for easier maintenance and trouble shooting.
It is easy to edit recipe with GUI and graph display.
Save all process data on the computer hard disk.
A/D and D/A precision is 14 to 16 bits.
Detect in process and with color curve displayed on the screen.
Robot teach is on the GUI and easy to do the procedure with new concept teaching method.
Software watch dog to eliminate machine damage duo to the computer locks up or freeze.
Sensor status detect function.
On line help function
Better performance and maintenance than the original systems

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